This article [J. Micro/Nanolith. MEMS MOEMS. 8, , 029701 (2009)] was originally published online 18 June 2009 with two errors. Equation (6) for the two-dimensional reaction-diffusion point spread function is missing a 2 in the denominator. The correct equation is Display FormulaAlso, Fig. 1 shows the numerical evaluation of the reaction-diffusion autocorrelation function for the 1-D, 2-D, and 3-D cases. Unfortunately, an error in the algorithm used to perform the 2-D and 3-D numerical convolutions needed to generate the 2-D and 3-D autocorrelation functions was in error. When performed correctly, the calculations for the 2-D and 3-D cases produce the exact same results as for the 1-D case. Thus, the 1-D curve shown in Fig. 1 is correct, and the 2-D and 3-D curves should fall exactly on top of the 1-D curve.