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New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints

[+] Author Affiliations
Hoi-Tou Ng

National Taiwan University, Department of Electrical Engineering, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan

Yu-Tian Shen

National Taiwan University, Department of Electrical Engineering, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan

Sheng-Yung Chen

National Taiwan University, Department of Electrical Engineering, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan

Chun-Hung Liu

National Taiwan University, Department of Electrical Engineering, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan

Philip C. W. Ng

National Taiwan University, Department of Electrical Engineering, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan

Kuen-Yu Tsai

National Taiwan University, Department of Electrical Engineering, No. 1, Sec. 4, Roosevelt Road, Taipei 10617, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 11(3), 033007 (Aug 22, 2012). doi:10.1117/1.JMM.11.3.033007
History: Received March 23, 2011; Revised April 28, 2012; Accepted June 26, 2012
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Abstract.  Low-energy electron beam lithography is one of the promising next-generation lithography technology solutions for the 21-nm half-pitch node and beyond because of fewer proximity effects, higher resist sensitivity, and less substrate damage compared with high-energy electron beam lithography. To achieve high-throughput manufacturing, low-energy electron beam lithography systems with writing parameters of larger beam size, larger grid size, and lower dosage are preferred. However, electron shot noise can significantly increase critical dimension deviation and line edge roughness. Its influence on patterning prediction accuracy becomes nonnegligible. To effectively maximize throughput while meeting patterning fidelity requirements according to the International Technology Roadmap for Semiconductors, a new method is proposed in this work that utilizes a new patterning prediction algorithm to rigorously characterize the patterning variability caused by the shot noise and a mathematical optimization algorithm to determine optimal writing parameters. The new patterning prediction algorithm can achieve a proper trade-off between computational effort and patterning prediction accuracy. Effectiveness of the new method is demonstrated on a static random-access memory circuit. The corresponding electrical performance is analyzed by using a gate-slicing technique and publicly available transistor models. Numerical results show that a significant improvement in the static noise margin can be achieved.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Hoi-Tou Ng ; Yu-Tian Shen ; Sheng-Yung Chen ; Chun-Hung Liu ; Philip C. W. Ng, et al.
"New method of optimizing writing parameters in electron beam lithography systems for throughput improvement considering patterning fidelity constraints", J. Micro/Nanolith. MEMS MOEMS. 11(3), 033007 (Aug 22, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.3.033007


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