21 September 2012 Microlight-emitting diode with integrated Fresnel zone plate for contact lens embedded display
Ramin Mirjalili, Babak Parviz
Author Affiliations +
Abstract
We report the fabrication and testing of 30-μm radii circular InGaN blue light-emitting didode (LEDs) grown on sapphire wafers, with cointegrated Fresnel zone plates (FZP) with outermost ring radii of 99.6 μm on the backside of the sapphire substrates to provide a collimated output. After being embedded on a contact lens platform such LEDs with integrated lenses can aid in producing in-focus images on the human retina. We measured an image width of 50 μm created by a FZP f/3 subsidiary focal point at 230 μm from the surface. We also demonstrate the construction and wireless operation of a contact lens with predetermined embedded text.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE) 0091-3286/2012/$25.00 © 2012 SPIE
Ramin Mirjalili and Babak Parviz "Microlight-emitting diode with integrated Fresnel zone plate for contact lens embedded display," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(3), 033010 (21 September 2012). https://doi.org/10.1117/1.JMM.11.3.033010
Published: 21 September 2012
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CITATIONS
Cited by 2 scholarly publications.
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KEYWORDS
Light emitting diodes

Zone plates

Semiconducting wafers

Sapphire

Diodes

Metals

Electron beam lithography

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