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Improved micro-optoelectromechanical systems deformable mirror for in vivo optical microscopy

[+] Author Affiliations
Mohammad J. Moghimi

Montana State University, Department of Electrical and Computer Engineering, 511 Cobleigh Hall, Bozeman, Montana 59717

Chris R. Wilson

Bridger Photonics, Inc., 2310 University Way, Building 4-4, Bozeman, Montana 59717

David L. Dickensheets

Montana State University, Department of Electrical and Computer Engineering, 530 Cobleigh Hall, Bozeman, Montana 59717

J. Micro/Nanolith. MEMS MOEMS. 11(4), 043006 (Oct 12, 2012). doi:10.1117/1.JMM.11.4.043006
History: Received June 11, 2012; Revised August 25, 2012; Accepted September 17, 2012
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Abstract.  Micro-optoelectromechanical systems (MOEMS) deformable mirrors are being developed for focus control in miniature optical systems including endoscopic microscopes and small form-factor camera lenses. A new process is described to create membrane mirrors made from the photoset polymer SU-8. The SU-8 also serves as the adhesive layer for wafer bonding, resulting in a simple, low cost fabrication process. The process details and the optical properties of the resulting focus control mirrors, which have a diameter of 2 mm, a stroke in excess of 8 μm and very low residual aberration, are described. Multiple actuation electrodes allow active control of more than 1.4 μm peak-to-peak of wavefront spherical aberration. The MOEMS mirror is demonstrated in a confocal microscope in which it provides focus control during capture of in vivo images.

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© 2012 Society of Photo-Optical Instrumentation Engineers

Citation

Mohammad J. Moghimi ; Chris R. Wilson and David L. Dickensheets
"Improved micro-optoelectromechanical systems deformable mirror for in vivo optical microscopy", J. Micro/Nanolith. MEMS MOEMS. 11(4), 043006 (Oct 12, 2012). ; http://dx.doi.org/10.1117/1.JMM.11.4.043006


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