We describe the development of novel suspension bridge-type microthermoelectric generators (-TEGs) having 64,000 to 147,000 serial-connected thermocouples in a 1-centimeter-square chip area using surface micromachining techniques. Each microthermocouple is constructed by a pair of bridge-type polysilicon thin-film thermolegs and a pair of cold- and hot-side metal planes. Under a controlled fixed temperature difference between the cold/hot sides, the open-circuit voltage and the output power of the proposed -TEGs are simulated by commercial software (ANSYS). The influences of thermocouple thermo-leg dimensions and number of thermocouples on the thermoelectric characteristics of presented -TEGs are investigated. The implemented suspension bridge-type thermopile has a 2.5-μm-height air-gap separation from substrate and its fabrication yield is higher than 75% in the laboratory environment. The measured maximum temperature difference between the cold/hot sides of the proposed -TEGs is about 1.29°C, a maximum open-circuit voltage of and output power of can be obtained.