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Development of microthermoelectric generators using integrated suspending bridge-type polysilicon thin-film thermopiles

[+] Author Affiliations
I-Yu Huang

National Sun Yat-Sen University, Department of Electrical Engineering, 70, Lien-Hai Road, Kaohsiung 80424, Taiwan

Guan-Ming Chen

National Sun Yat-Sen University, Department of Electrical Engineering, 70, Lien-Hai Road, Kaohsiung 80424, Taiwan

Ting-Yi Wu

National Sun Yat-Sen University, Department of Electrical Engineering, 70, Lien-Hai Road, Kaohsiung 80424, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 12(1), 013001 (Jan 02, 2013). doi:10.1117/1.JMM.12.1.013001
History: Received October 21, 2012; Revised November 21, 2012; Accepted November 29, 2012
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Abstract.  We describe the development of novel suspension bridge-type microthermoelectric generators (μ-TEGs) having 64,000 to 147,000 serial-connected thermocouples in a 1-centimeter-square chip area using surface micromachining techniques. Each microthermocouple is constructed by a pair of n/p bridge-type polysilicon thin-film thermolegs and a pair of cold- and hot-side Cr/Au metal planes. Under a controlled fixed temperature difference between the cold/hot sides, the open-circuit voltage and the output power of the proposed μ-TEGs are simulated by commercial software (ANSYS). The influences of thermocouple thermo-leg dimensions and number of thermocouples on the thermoelectric characteristics of presented μ-TEGs are investigated. The implemented suspension bridge-type thermopile has a 2.5-μm-height air-gap separation from substrate and its fabrication yield is higher than 75% in the laboratory environment. The measured maximum temperature difference between the cold/hot sides of the proposed μ-TEGs is about 1.29°C, a maximum open-circuit voltage of 4.64V/cm2 and output power of 0.65μW/cm2 can be obtained.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

I-Yu Huang ; Guan-Ming Chen and Ting-Yi Wu
"Development of microthermoelectric generators using integrated suspending bridge-type polysilicon thin-film thermopiles", J. Micro/Nanolith. MEMS MOEMS. 12(1), 013001 (Jan 02, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.1.013001


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