Special Section on Photomasks for Extreme Ultraviolet Lithography

Development of extreme ultraviolet mask pattern inspection technology using projection electron beam optics

[+] Author Affiliations
Ryoichi Hirano

Extreme Ultraviolet Lithography Infrastructure Development Center Inc., 16-1 Onogawa, Tsukuba-shi, Ibaraki-ken 305-8569, Japan

Hidehiro Watanabe, Susumu Iida, Tsuyoshi Amano, Tsuneo Terasawa

Extreme Ultraviolet Lithography Infrastructure Development Center Inc., 16-1 Onogawa, Tsukuba-shi, Ibaraki-ken 305-8569, Japan

Masahiro Hatakeyama, Takeshi Murakami

EBARA Corporation, 4-2-1, Honfujisawa, Fujisawa-shi 251-8502, Japan

J. Micro/Nanolith. MEMS MOEMS. 12(2), 021003 (Feb 28, 2013). doi:10.1117/1.JMM.12.2.021003
History: Received August 31, 2012; Revised February 4, 2013; Accepted February 12, 2013
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Abstract.  Extreme ultraviolet (EUV) lithography with a 13.5 nm exposure wavelength is a leading candidate for the next-generation lithography because of its excellent resolution for 16 nm half pitch (hp) node devices and beyond. High sensitivity EUV mask pattern defect detection is one of the major issues to realize device fabrication with EUV lithography. First, to estimate targeted pattern defect detection size, a simulation for defect printability was carried out. In order to achieve the required inspection sensitivity applicable for 1X nm node, a projection electron microscopy (PEM) system was employed, which enabled us to do inspection in higher resolution and with higher speed in comparison to those of the conventional deep ultraviolet and electron beam inspection systems. By incorporating high electron energy and low optical aberration into the PEM, we designed a system for 16 nm hp node defect inspection. To guarantee the quality of the 16 nm node EUV mask, corresponding sized programmed defect masks were designed, and a PEM system defect detection was evaluated by using the current system for 2X nm generation.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Ryoichi Hirano ; Hidehiro Watanabe ; Susumu Iida ; Tsuyoshi Amano ; Tsuneo Terasawa, et al.
"Development of extreme ultraviolet mask pattern inspection technology using projection electron beam optics", J. Micro/Nanolith. MEMS MOEMS. 12(2), 021003 (Feb 28, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.2.021003


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