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Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure

[+] Author Affiliations
I-Yu Huang

National Sun Yat-Sen University, Department of Electrical Engineering, 70, Lien-Hai Road, Kaohsiung 80424, Taiwan

Chang-Yu Lin

National Sun Yat-Sen University, Department of Electrical Engineering, 70, Lien-Hai Road, Kaohsiung 80424, Taiwan

Je-Wei Lan

National Sun Yat-Sen University, Department of Electrical Engineering, 70, Lien-Hai Road, Kaohsiung 80424, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 12(1), 013019 (Mar 28, 2013). doi:10.1117/1.JMM.12.1.013019
History: Received November 9, 2012; Revised March 1, 2013; Accepted March 11, 2013
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Abstract.  A novel silicon groove reflective grating structure (RGS) to reduce effectively the insertion loss of a high C-axis (002) thin-film zinc oxide (ZnO) surface acoustic wave (SAW) device is proposed. The insertion loss (S21 parameter) of three types of SAW devices was investigated and compared; one type had no RGS design, and the other two types had either a conventional metal electrode RGS or a novel etched silicon groove RGS. The wave propagation modes, the harmonic response, and the displacement amplitude profile of the proposed SAW devices were simulated by finite element analysis software (ANSYS). The implemented basic SAW device consists of a sputter-deposited high-quality ZnO thin film on the surface of a Si/SiO2/Si3N4/Cr/Au substrate. The insertion loss of the proposed SAW device with silicon groove RGS can be reduced to 19.49dB, which is much smaller than the insertion losses of the SAW devices with a metal electrode-type RGS (33.15dB) and without an RGS (47.9dB). The resonant frequencies of the SAW devices studied (47.37 to 48.05 MHz) are in close agreement with the simulated results (46.8 to 47.55 MHz).

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

I-Yu Huang ; Chang-Yu Lin and Je-Wei Lan
"Improving thin-film zinc-oxide surface acoustic wave device insertion loss using a grooved reflective grating structure", J. Micro/Nanolith. MEMS MOEMS. 12(1), 013019 (Mar 28, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.1.013019


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