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MOEMS tunable microlens made of aluminum nitride membranes

[+] Author Affiliations
Steffen Leopold

IMN MacroNano®, Ilmenau University of Technology, Micromechanical Systems Group, Max-Planck-Ring 12, 98693 Ilmenau, Germany

Tobias Polster

IMN MacroNano®, Ilmenau University of Technology, Micromechanical Systems Group, Max-Planck-Ring 12, 98693 Ilmenau, Germany

Daniel Paetz

IMN MacroNano®, Ilmenau University of Technology, Department of Optical Engineering, Helmholtzring 1, 98693 Ilmenau, Germany

Fabian Knoebber

Fraunhofer Institute for Applied Solid State Physics FhG IAF, Tullastraße 72, 79108 Freiburg, Germany

Oliver Ambacher

Fraunhofer Institute for Applied Solid State Physics FhG IAF, Tullastraße 72, 79108 Freiburg, Germany

Stefan Sinzinger

IMN MacroNano®, Ilmenau University of Technology, Department of Optical Engineering, Helmholtzring 1, 98693 Ilmenau, Germany

Martin Hoffmann

IMN MacroNano®, Ilmenau University of Technology, Micromechanical Systems Group, Max-Planck-Ring 12, 98693 Ilmenau, Germany

J. Micro/Nanolith. MEMS MOEMS. 12(2), 023012 (Jun 10, 2013). doi:10.1117/1.JMM.12.2.023012
History: Received December 6, 2012; Revised April 25, 2013; Accepted May 9, 2013
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Abstract.  We present tunable lenses based on aluminum nitride membranes. The achievable tuning range in the refractive power is 0 to 25 dpt with an external pressure load of 20kPa. The lenses are manufactured using MOEMS technology. For 500-nm-thick membranes with a diameter of 3 mm, a spherical deflection profile is found. The system provides good long-term stability showing no creep or hysteresis. A model for the refractive power versus applied pressure is derived and validated experimentally. Based on this model, design guidelines are discussed. One essential parameter is the residual stress of the aluminum nitride layer that can be controlled during deposition.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Steffen Leopold ; Tobias Polster ; Daniel Paetz ; Fabian Knoebber ; Oliver Ambacher, et al.
"MOEMS tunable microlens made of aluminum nitride membranes", J. Micro/Nanolith. MEMS MOEMS. 12(2), 023012 (Jun 10, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.2.023012


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