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Development of a low-hysteresis and high-linearity extended gate field-effect transistor-based chloride ion-sensitive microsensor

[+] Author Affiliations
I-Yu Huang

National Sun Yat-Sen University, Department of Electrical Engineering, Kaohsiung 80424, Taiwan

Chia-Hsu Hsieh

National Sun Yat-Sen University, Department of Electrical Engineering, Kaohsiung 80424, Taiwan

Wei-Chun Chang

National Sun Yat-Sen University, Department of Electrical Engineering, Kaohsiung 80424, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 12(2), 023016 (Jun 12, 2013). doi:10.1117/1.JMM.12.2.023016
History: Received November 7, 2012; Revised April 18, 2013; Accepted May 21, 2013
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Abstract.  A low-hysteresis voltage and high-sensing linearity chloride ion-sensitive sensor based on an extended gate field-effect transistor (EGFET) for real-time water quality monitoring microsystem applications is presented. All of the EGFET-manufacturing processes adopted in this work are compatible with standard integrated circuits planar technology, and therefore, they are very suitable for the mass production. Two EGFET-based chloride ion-sensitive microsensors having same channel width/length ratio (1000μm/10μm) but with different channel geometries (rectangular and annular types) are presented. At pCl 3 (log[Cl]=3) test point, a very small hysteresis voltage of the rectangular- and annular-channels EGFET-based Cl microsensors (5 and 7 mV, respectively) can be achieved. As the concentrations tested ranging from pCl 1 (log[Cl]=1) to pCl 5 (log[Cl]=5), a very high-sensing linearity (99.23% and 99.08%) of the two types of EGFET-based Cl microsensors is achieved. However, the sensitivity of the rectangular-channel EGFET-based Cl microsensor (45mV/pCl) is much higher than that of the annular-channel EGFET-based Cl microsensor (37mV/pCl). The selectivity coefficient of the investigated EGFET-chloride ion sensor under four different interfering ions (OH, F, SO42, and Br) are also measured and analyzed.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

I-Yu Huang ; Chia-Hsu Hsieh and Wei-Chun Chang
"Development of a low-hysteresis and high-linearity extended gate field-effect transistor-based chloride ion-sensitive microsensor", J. Micro/Nanolith. MEMS MOEMS. 12(2), 023016 (Jun 12, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.2.023016


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