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Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness

[+] Author Affiliations
Jianbin Su

National University of Defense Technology, College of Mechatronics and Automation, Changsha 410073, China

Dingbang Xiao

National University of Defense Technology, College of Mechatronics and Automation, Changsha 410073, China

Xuezhong Wu, Zhanqiang Hou, Zhihua Chen

National University of Defense Technology, College of Mechatronics and Automation, Changsha 410073, China

J. Micro/Nanolith. MEMS MOEMS. 12(3), 033008 (Aug 02, 2013). doi:10.1117/1.JMM.12.3.033008
History: Received April 24, 2013; Revised June 27, 2013; Accepted July 9, 2013
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Abstract.  We present a dynamic electrical balancing of coupling stiffness for improving the bias stability of micromachined gyroscopes, which embeds the coupling stiffness in a closed-loop system to make the micromachined gyroscope possess more robust bias stability by suppressing the variation of coupling stiffness. The effect of the dynamic electrical balancing control is theoretically analyzed and implemented using a silicon micromachined gyroscope as an example case. It has been experimentally shown that, comparing with open loop detection, the proposed method increased the stability of the amplitude of the mechanical quadrature signal by 38 times, and therefore improved the bias stability by 5.2 times from 89 to 17deg/h, and the temperature stability of scale factor by 2.7 times from 622 to 231ppm/°C. Experimental results effectively indicated the theoretical model of dynamic electrical balancing of coupling stiffness.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Jianbin Su ; Dingbang Xiao ; Xuezhong Wu ; Zhanqiang Hou and Zhihua Chen
"Improvement of bias stability for a micromachined gyroscope based on dynamic electrical balancing of coupling stiffness", J. Micro/Nanolith. MEMS MOEMS. 12(3), 033008 (Aug 02, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.3.033008


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