Regular Articles

Systematic errors in the measurement of power spectral density

[+] Author Affiliations
Chris A. Mack

Lithoguru.com, 1605 Watchhill Road, Austin, Texas 78703

J. Micro/Nanolith. MEMS MOEMS. 12(3), 033016 (Sep 03, 2013). doi:10.1117/1.JMM.12.3.033016
History: Received April 8, 2013; Revised July 12, 2013; Accepted August 6, 2013
Text Size: A A A

Abstract.  Measurement of the power spectral density (PSD) of a rough surface or a feature involves large random and systematic errors. While random errors can be reduced by averaging together many PSDs, systematic errors can be reduced only by carefully studying and understanding the sources of these systematic biases. Using both analytical expressions and numerical simulations for the measurement of the PSD of line-edge roughness, four sources of systematic errors are evaluated: aliasing, leakage, averaging, and image noise. Exact and approximate expressions for each of these terms are derived over a range of roughness exponents, allowing a measured PSD to be corrected for its systematic biases. In the absence of image noise, the smallest measurement bias is obtained when appropriate data windowing is used and when the sampling distance is set to twice the measurement signal width. Uncorrected PSD measurements are likely to systematically bias each of the PSD parameters, with the roughness exponent especially susceptible to bias.

Figures in this Article
© 2013 Society of Photo-Optical Instrumentation Engineers

Topics

Simulations

Citation

Chris A. Mack
"Systematic errors in the measurement of power spectral density", J. Micro/Nanolith. MEMS MOEMS. 12(3), 033016 (Sep 03, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.3.033016


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.