Regular Articles

Specimen alignment of micro-tensile testing using vernier-groove carrier or specimen with piezoresistive cells

[+] Author Affiliations
Duanqin Zhang

Zhengzhou University of Light Industry, Mechanical and Electrical Engineering Institute, Zhengzhou, Henan 450002, China

Jianxiu Liu

Zhengzhou University of Light Industry, Mechanical and Electrical Engineering Institute, Zhengzhou, Henan 450002, China

Le Guan

Dalian University of Technology, School of Mechanical Engineering,Dalian, Liaoning 116024, China

Jinkui Chu

Dalian University of Technology, School of Mechanical Engineering,Dalian, Liaoning 116024, China

J. Micro/Nanolith. MEMS MOEMS. 12(3), 033017 (Sep 03, 2013). doi:10.1117/1.JMM.12.3.033017
History: Received May 30, 2013; Revised July 17, 2013; Accepted July 29, 2013
Text Size: A A A

Abstract.  Specimen alignment is critical for the accuracy and the reliability of micro-tensile testing. A vernier-groove carrier fabricated by bulk micromachining of silicon is developed. Through the vernier in the carrier the alignment accuracy can be detected, and the groove and the convex stands guarantee rapid alignment and high repeatability. In order to demonstrate the validity of the carrier, a micro-tensile specimen integrated with piezoresistive cells is designed. The specimen can detect axial alignment precision and tensile force simultaneously. The performances of the carrier and the specimen are tested by using a micro-tensile tester. By comparing the measured results of micro-tensile testing with the carrier and without the carrier, it is confirmed that high alignment precision and high repeatability can be obtained by the carrier. For the specimen, the sensitivity coefficient of the piezoresistive cells for tensile force measurement is equal to 0.017mV/mN.

Figures in this Article
© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Duanqin Zhang ; Jianxiu Liu ; Le Guan and Jinkui Chu
"Specimen alignment of micro-tensile testing using vernier-groove carrier or specimen with piezoresistive cells", J. Micro/Nanolith. MEMS MOEMS. 12(3), 033017 (Sep 03, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.3.033017


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement


 

  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.