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Fabricating process of hollow out-of-plane Ni microneedle arrays and properties of the integrated microfluidic device

[+] Author Affiliations
Jun Zhu

Shanghai Jiao Tong University, Institute of Micro/Nano Science and Technology, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Shanghai 200240, China

Ying Cao, Hong Wang, Yigui Li, Xiang Chen, Di Chen

Shanghai Jiao Tong University, Institute of Micro/Nano Science and Technology, National Key Laboratory of Nano/Micro Fabrication Technology, Key Laboratory for Thin Film and Microfabrication of the Ministry of Education, Shanghai 200240, China

J. Micro/Nanolith. MEMS MOEMS. 12(3), 033019 (Sep 25, 2013). doi:10.1117/1.JMM.12.3.033019
History: Received May 14, 2013; Revised July 23, 2013; Accepted August 12, 2013
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Abstract.  Although microfluidic devices that integrate microfluidic chips with hollow out-of-plane microneedle arrays have many advantages in transdermal drug delivery applications, difficulties exist in their fabrication due to the special three-dimensional structures of hollow out-of-plane microneedles. A new, cost-effective process for the fabrication of a hollow out-of-plane Ni microneedle array is presented. The integration of PDMS microchips with the Ni hollow microneedle array and the properties of microfluidic devices are also presented. The integrated microfluidic devices provide a new approach for transdermal drug delivery.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Jun Zhu ; Ying Cao ; Hong Wang ; Yigui Li ; Xiang Chen, et al.
"Fabricating process of hollow out-of-plane Ni microneedle arrays and properties of the integrated microfluidic device", J. Micro/Nanolith. MEMS MOEMS. 12(3), 033019 (Sep 25, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.3.033019


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