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Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers

[+] Author Affiliations
Sujatha Lakshminarayanan

Rajalakshmi Engineering College, National MEMS Design Center, Thandalam, Chennai 602105, Tamil Nadu, India

Siddhartha Goutham Murali

Rajalakshmi Engineering College, National MEMS Design Center, Thandalam, Chennai 602105, Tamil Nadu, India

Saravanan Mani

Rajalakshmi Engineering College, National MEMS Design Center, Thandalam, Chennai 602105, Tamil Nadu, India

Selvakumar Varatharajan Subramani

Rajalakshmi Engineering College, National MEMS Design Center, Thandalam, Chennai 602105, Tamil Nadu, India

J. Micro/Nanolith. MEMS MOEMS. 12(3), 033020 (Sep 25, 2013). doi:10.1117/1.JMM.12.3.033020
History: Received March 27, 2013; Revised August 15, 2013; Accepted September 4, 2013
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Abstract.  Recently, microgrippers are finding more importance in the field of tissue engineering and microassembly in semiconductor electronics. Large force and, hence, large displacement, low power, and low temperature are the essential features to be considered during the design of the microgrippers. The electrical and mechanical behaviors of electrothermally actuated silicon microgrippers are presented. The effect of increasing the flexure length and the cold arm area to improve the displacement is discussed. These microgrippers are normally of the open type, in which the arms have an initial open gap of 20 μm, and they move away from each other with the applied voltage. The displacement of each arm is observed to be 24 μm for the applied voltage of 10 V. The response time of the device is less than 5 ms, and the maximum power dissipation is 110 mW. The displacement of the microgrippers can be increased with increased flexure length and cold arm length with short extended arms. This structure also shows lower stress.

© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Sujatha Lakshminarayanan ; Siddhartha Goutham Murali ; Saravanan Mani and Selvakumar Varatharajan Subramani
"Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers", J. Micro/Nanolith. MEMS MOEMS. 12(3), 033020 (Sep 25, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.3.033020


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