Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers

Sujatha Lakshminarayanan; Siddhartha Goutham Murali; Saravanan Mani; Selvakumar Varatharajan Subramani

doi:10.1117/1.JMM.12.3.033020

25 September 2013 Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers

Sujatha Lakshminarayanan, Siddhartha Goutham Murali, Saravanan Mani, Selvakumar Varatharajan Subramani

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 3, 033020 (September 2013). https://doi.org/10.1117/1.JMM.12.3.033020

Abstract

Recently, microgrippers are finding more importance in the field of tissue engineering and microassembly in semiconductor electronics. Large force and, hence, large displacement, low power, and low temperature are the essential features to be considered during the design of the microgrippers. The electrical and mechanical behaviors of electrothermally actuated silicon microgrippers are presented. The effect of increasing the flexure length and the cold arm area to improve the displacement is discussed. These microgrippers are normally of the open type, in which the arms have an initial open gap of 20 μm, and they move away from each other with the applied voltage. The displacement of each arm is observed to be 24 μm for the applied voltage of 10 V. The response time of the device is less than 5 ms, and the maximum power dissipation is 110 mW. The displacement of the microgrippers can be increased with increased flexure length and cold arm length with short extended arms. This structure also shows lower stress.

Citation Download Citation

Sujatha Lakshminarayanan, Siddhartha Goutham Murali, Saravanan Mani, and Selvakumar Varatharajan Subramani "Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(3), 033020 (25 September 2013). https://doi.org/10.1117/1.JMM.12.3.033020

Published: 25 September 2013

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