Errata

Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers

[+] Author Affiliations
Sujatha Lakshminarayanan, Siddhartha Goutham Murali, Saravanan Mani, Selvakumar Varatharajan Subramani

Rajalakshmi Engineering College, National MEMS Design Center, Thandalam, Chennai 602105, Tamil Nadu, India

J. Micro/Nanolith. MEMS MOEMS. 12(4), 049801 (Oct 04, 2013). doi:10.1117/1.JMM.12.4.049801
History:
Text Size: A A A

Open Access Open Access

This article [J. Micro/Nanolith. MEMS MOEMS. , 12, (3 ), 033020  (2013)] was originally published online on 25 September 2013 with errors in the authors’ names.

The names originally appeared as Lakshminarayanan Sujatha, Murali Siddhartha Goutham, Mani Saravanan, and Varatharajan Subramani Selvakumar. The corrected names appear above.

All online versions of the article were corrected on 27 September 2013. The article appears correctly in print.

© The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.

Citation

Sujatha Lakshminarayanan ; Siddhartha Goutham Murali ; Saravanan Mani and Selvakumar Varatharajan Subramani
"Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers", J. Micro/Nanolith. MEMS MOEMS. 12(4), 049801 (Oct 04, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.4.049801


Figures

Tables

References

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.