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4 October 2013 Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers
Lakshminarayanan Sujatha, Siddhartha G. Murali, Saravanan Mani, Selvakumar V. Subramani
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Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 12, Issue 4, 049801 (October 2013). https://doi.org/10.1117/1.JMM.12.4.049801
Abstract
This article [J. Micro/Nanolith. MEMS MOEMS. , 12, (3 ), 033020 (2013)] was originally published online on 25 September 2013 with errors in the authors’ names.The names originally appeared as Lakshminarayanan Sujatha, Murali Siddhartha Goutham, Mani Saravanan, and Varatharajan Subramani Selvakumar. The corrected names appear above.All online versions of the article were corrected on 27 September 2013. The article appears correctly in print.

This article [J. Micro/Nanolith. MEMS MOEMS, 12(3), 033020 (2013)] was originally published online on 25 September 2013 with errors in the authors’ names.

The names originally appeared as Lakshminarayanan Sujatha, Murali Siddhartha Goutham, Mani Saravanan, and Varatharajan Subramani Selvakumar. The corrected names appear above.

All online versions of the article were corrected on 27 September 2013. The article appears correctly in print.
© The Authors. Published by SPIE under a Creative Commons Attribution 3.0 Unported License. Distribution or reproduction of this work in whole or in part requires full attribution of the original publication, including its DOI.
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Lakshminarayanan Sujatha, Siddhartha G. Murali, Saravanan Mani, and Selvakumar V. Subramani "Errata: Performance of silicon-on-insulator multiuser MEMS processes–based electrothermally actuated silicon microgrippers," Journal of Micro/Nanolithography, MEMS, and MOEMS 12(4), 049801 (4 October 2013). https://doi.org/10.1117/1.JMM.12.4.049801
Published: 4 October 2013
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KEYWORDS
Silicon
Microelectromechanical systems
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