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Special Section on Advanced Fabrication of MEMS and Photonic Devices

Metal-organic hybrid resonant terahertz absorbers with SU-8 photoresist dielectric layer

[+] Author Affiliations
Dragoslav Grbovic, Fabio Alves, Brian Kearney

Naval Postgraduate School, Department of Physics, 833 Dyer Road, Monterey, California 93943

Benjamin Waxer

California Institute of Technology, Pasadena, California 91106

Rolando Perez, George Omictin

Hartnell College, 411 Central Avenue, Salinas, California 93901

J. Micro/Nanolith. MEMS MOEMS. 12(4), 041204 (Oct 22, 2013). doi:10.1117/1.JMM.12.4.041204
History: Received June 21, 2013; Revised August 19, 2013; Accepted September 16, 2013
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Abstract.  We report on the characterization of metal-organic hybrid metamaterials for MEMS-based terahertz (THz) thermal sensors and on the characterization of refractive index of SU-8 in the THz band. This type of metamaterial, coupled with the applicability of SU-8 as a structural material, offers possibilities for quick, simple microfabrication of THz imagers. SU-8, a negative photoresist, is a low-cost material that can quickly be spun onto a substrate at a wide range of thicknesses, and then photolithographically patterned into a variety of structures. It is also transparent to THz radiation and thus a suitable choice for a dielectric spacer in metamaterials. We investigated metamaterials consisting of a 0.18 μm Al ground plane and 0.18-μm layer of patterned Al separated by a dielectric spacer of 0.5μm of SU-8. Absorption close to 70% at around 6.1 THz was observed. A model was developed to simulate absorption spectra of several metamaterials, agreeing well with experiments. Matching simulation to measurements was used to determine the refractive index of SU-8 at THz frequencies, extending the known values from 0.1 to 1.6 THz to as far as 10 THz. Finally, Kirchoff’s law for these metamaterials was verified and their use as THz emitters demonstrated with about 0.8mW/cm2 output.

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© 2013 Society of Photo-Optical Instrumentation Engineers

Citation

Dragoslav Grbovic ; Fabio Alves ; Brian Kearney ; Benjamin Waxer ; Rolando Perez, et al.
"Metal-organic hybrid resonant terahertz absorbers with SU-8 photoresist dielectric layer", J. Micro/Nanolith. MEMS MOEMS. 12(4), 041204 (Oct 22, 2013). ; http://dx.doi.org/10.1117/1.JMM.12.4.041204


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