Special Section on Emerging MOEMS Technology and Applications

Cryogenic testing of a unimorph-type deformable mirror and theoretical material optimization

[+] Author Affiliations
Matthias Goy

Friedrich Schiller University of Jena, Institute of Applied Physics, Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, 07745 Jena, Germany

Claudia Reinlein

Friedrich Schiller University of Jena, Institute of Applied Physics, Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, 07745 Jena, Germany

Jan Kinast

Friedrich Schiller University of Jena, Institute of Applied Physics, Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, 07745 Jena, Germany

Nicolas Lange

Friedrich Schiller University of Jena, Institute of Applied Physics, Fraunhofer Institute for Applied Optics and Precision Engineering, Albert-Einstein-Strasse 7, 07745 Jena, Germany

J. Micro/Nanolith. MEMS MOEMS. 13(1), 011107 (Nov 27, 2013). doi:10.1117/1.JMM.13.1.011107
History: Received July 15, 2013; Revised November 1, 2013; Accepted November 4, 2013
Text Size: A A A

Abstract.  The testing of a lightweight unimorph-type deformable mirror (DM) for wavefront correction in cryogenic instruments is reported. The presented mirror manufactured from the titanium alloy TiAl6V4 with a piezoelectric disk actuator was cooled to 86 K and characterized for thermally induced deformation and the achievable piezoelectric stroke between room temperature and 86 K. Through a finite element analysis, we obtained a first approximation in determining the exact temperature-dependent coefficient of thermal expansion (CTE) of the piezo material PIC151. Simulations were based on dilatometer measurements of the CTE of the TiAl6V4 mirror base between room temperature and 86 K. These investigations will enable the improvement of the athermal design of a unimorph-type DM.

Figures in this Article
© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Matthias Goy ; Claudia Reinlein ; Jan Kinast and Nicolas Lange
"Cryogenic testing of a unimorph-type deformable mirror and theoretical material optimization", J. Micro/Nanolith. MEMS MOEMS. 13(1), 011107 (Nov 27, 2013). ; http://dx.doi.org/10.1117/1.JMM.13.1.011107


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.