Special Section on Emerging MOEMS Technology and Applications

Polygonal pyramidal reflector-based micromachined microscanners for bioimaging

[+] Author Affiliations
Xiaojing Mu

National University of Singapore, Department of Mechanical Engineering, 21 Lower Kent Ridge Road, Singapore 117576, Singapore

Agency for Science, Technology and Research, Institute of Microelectronics, 11 Science Park RoadSingapore 117685, Singapore

Dennis Wee Keong Neo

National University of Singapore, Department of Mechanical Engineering, 21 Lower Kent Ridge Road, Singapore 117576, Singapore

Hongbin Yu

Agency for Science, Technology and Research, Institute of Microelectronics, 11 Science Park RoadSingapore 117685, Singapore

A. Senthil Kumar

National University of Singapore, Department of Mechanical Engineering, 21 Lower Kent Ridge Road, Singapore 117576, Singapore

Fook Siong Chau

National University of Singapore, Department of Mechanical Engineering, 21 Lower Kent Ridge Road, Singapore 117576, Singapore

J. Micro/Nanolith. MEMS MOEMS. 13(1), 011109 (Dec 16, 2013). doi:10.1117/1.JMM.13.1.011109
History: Received July 16, 2013; Revised October 31, 2013; Accepted November 8, 2013
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Abstract.  In order to alleviate problems arising from the dynamic deformation of thin microelectromechanical systems (MEMS) micromirrors and to realize full circumferential scanning (FCS) that is highly desired in some clinic applications, such as gastrointestinal and intravascular investigations, three prototypes of polygonal pyramidal reflector-based MEMS microscanners have been developed and are described. The cascaded chevron-beam electrothermal actuator, comb-drive electrostatic actuator with double T-shaped spring mechanism, and comb-drive electrostatic actuator with resonating mechanism were investigated in detail as a means to drive a polygonal microreflector. The polygonal microreflector, which has multiple facets on its surface, was fabricated through a route involving KOH wet-etching processing and diamond-turning soft lithography technologies. The assembly process of the actuators and the microreflector is also presented. Near-FCS capability can be realized by all the three different MEMS devices. A peak scanning speed up to 180 Hz and a maximum optical scanning angle of 240 deg were achieved by the electrostatic-resonating MEMS microscanner.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Xiaojing Mu ; Dennis Wee Keong Neo ; Hongbin Yu ; A. Senthil Kumar and Fook Siong Chau
"Polygonal pyramidal reflector-based micromachined microscanners for bioimaging", J. Micro/Nanolith. MEMS MOEMS. 13(1), 011109 (Dec 16, 2013). ; http://dx.doi.org/10.1117/1.JMM.13.1.011109


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