This article [J. Micro/Nanolith. MEMS MOEMS. , 12, (4 ), 041203 (2013)] was originally published online on 25 September 2013 with errors in Figure 6. The figure sequence in the caption did not match the sequence given in the figure. Also, Fig. 6(d) showed an image of aluminum mask with a crossbar on the image which is not visible and an improper scale with a typographical error.