Regular Articles

Simulations and experiments on excimer laser micromachining of metal and polymer

[+] Author Affiliations
Syed Nadeem Akhtar

Indian Institute of Technology Kanpur, Department of Mechanical Engineering, Kanpur—208016, India

Hirendra Choudhary

Schlumberger, Mumbai, India

S. Anantha Ramakrishna

Indian Institute of Technology Kanpur, Department of Physics, Kanpur—208016, India

Janakarajan Ramkumar

Indian Institute of Technology Kanpur, Department of Mechanical Engineering, Kanpur—208016, India

J. Micro/Nanolith. MEMS MOEMS. 13(1), 013008 (Feb 14, 2014). doi:10.1117/1.JMM.13.1.013008
History: Received September 25, 2013; Revised December 11, 2013; Accepted January 16, 2014
Text Size: A A A

Abstract.  Excimer laser at 248 nm has been used to micromachine holes and channels on stainless steel and polymethyl methacrylate using mask projection methods. The machining is numerically simulated considering the laser beam as a heat source only, thermal diffusion, and melt vaporization. The depth and width of the machined features at different pulse energies and number of pulses are measured by optical profilometry. Both the depth and the aspect ratio (depth-to-width) are found to increase with increasing number of pulses and pulse energies. The depth predicted by the simulations based on the thermal ablation model is closer to the experimental observations for steel as compared with that for the polymer. This allows for the quantification of the contribution of thermal ablation processes in the excimer laser machining of metals and polymers. High-energy pulses are found to have higher ablation efficiency in case of metal and lower ablation efficiency in case of polymer.

Figures in this Article
© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Syed Nadeem Akhtar ; Hirendra Choudhary ; S. Anantha Ramakrishna and Janakarajan Ramkumar
"Simulations and experiments on excimer laser micromachining of metal and polymer", J. Micro/Nanolith. MEMS MOEMS. 13(1), 013008 (Feb 14, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.1.013008


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.