Special Section on Emerging MOEMS Technology and Applications

Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera

[+] Author Affiliations
Thilo Sandner

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

Thomas Grasshoff

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

Markus Schwarzenberg

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

Richard Schroedter

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

Harald Schenk

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

J. Micro/Nanolith. MEMS MOEMS. 13(1), 011114 (Feb 20, 2014). doi:10.1117/1.JMM.13.1.011114
History: Received August 16, 2013; Revised December 28, 2013; Accepted January 22, 2014
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Abstract.  This paper reports on a gimbaled MEMS scanning mirror with quasistatic resonant actuation, specially developed for adaptive raster scanning in an innovative three-dimensional (3-D) time-of-flight (ToF) laser camera with real-time foveation. Large quasistatic deflections of ±10deg are provided by vertical comb drives in the vertical direction in contrast to resonant horizontal scanning. This mirror is 2.6×3.6mm and operates at 1600 Hz with an 80-deg optical scan range. For position feedback, piezo-resistive position sensors are integrated on chip for both axes. To guarantee the full reception aperture of effectively 5 mm, a synchronized driven MEMS scanner array—consisting of five hybrid assembled MEMS devices—is used in an innovative 3-D ToF laser scanner. This enables a distance measuring rate of 1MVoxel/s with an uncertainty in distance measurement of 3 to 5 mm for a 7.5-m measuring range for a gray target. Flatness-based open loop control is used for driving control of quasistatic axis in order to compensate for the dynamics of the low damped MEMS system.

© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Thilo Sandner ; Thomas Grasshoff ; Markus Schwarzenberg ; Richard Schroedter and Harald Schenk
"Quasistatic microscanner with linearized scanning for an adaptive three-dimensional laser camera", J. Micro/Nanolith. MEMS MOEMS. 13(1), 011114 (Feb 20, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.1.011114


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