Special Section on Emerging MOEMS Technology and Applications

Design and fabrication of Fabry–Perot filters for infrared hyperspectral imagers

[+] Author Affiliations
Michael L. Morley

EPIR Technologies, Inc., 590 Territorial Drive Unit B, Bolingbrook, Illinois 60440

Silviu Velicu

EPIR Technologies, Inc., 590 Territorial Drive Unit B, Bolingbrook, Illinois 60440

Yong Chang

Sivananthan Laboratories, Inc., 590 Territorial Drive Suite H, Bolingbrook, Illinois 60440

Christoph H. Grein

Sivananthan Laboratories, Inc., 590 Territorial Drive Suite H, Bolingbrook, Illinois 60440

University of Illinois at Chicago, Department of Physics, 845 West Taylor Street #2236, Chicago, Illinois 60607

Dmitry A. Kozak

Naval Research Laboratory, Photonics Technology Branch, 4555 Overlook Avenue SW, Washington, DC 20375

Bautista Fernandez

Naval Postgraduate School, Spacecraft Research and Design Center, 1 University Circle Monterey, California 93943

Joel Kubby

University of California Santa Cruz, Department of Electrical Engineering, 1156 High Street, Santa Cruz, California 95064

Neelam Gupta

U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

J. Micro/Nanolith. MEMS MOEMS. 13(1), 011116 (Mar 13, 2014). doi:10.1117/1.JMM.13.1.011116
History: Received July 15, 2013; Revised February 3, 2014; Accepted February 11, 2014
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Abstract.  Hyperspectral infrared imagers are of great interest in applications requiring remote identification of complex chemical agents. The combination of mercury cadmium telluride detectors and Fabry–Perot filters (FPFs) is highly desirable for hyperspectral detection over a broad wavelength range. The geometries of distributed Bragg reflector (DBR)-based tunable FPFs are modeled to achieve a desired spectral resolution and wavelength range. Additionally, acceptable fabrication tolerances are determined by modeling the spectral performance of the FPFs as a function of DBR surface roughness and membrane curvature. These fabrication nonidealities are then mitigated by developing an optimized DBR process flow yielding high-performance FPF cavities suitable for integration with hyperspectral imagers.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Michael L. Morley ; Silviu Velicu ; Yong Chang ; Christoph H. Grein ; Dmitry A. Kozak, et al.
"Design and fabrication of Fabry–Perot filters for infrared hyperspectral imagers", J. Micro/Nanolith. MEMS MOEMS. 13(1), 011116 (Mar 13, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.1.011116


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