Special Section on Emerging MOEMS Technology and Applications

Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers

[+] Author Affiliations
Thilo Sandner

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

Thomas Grasshoff

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

Eric Gaumont

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

Harald Schenk

Fraunhofer Institute for Photonic Microsystems (IPMS), Maria-Reiche-Straße 2, D-01109 Dresden, Germany

Andreas Kenda

Carinthian Tech Research AG, Europastrasse 4/1, A-9524 Villach, Austria

J. Micro/Nanolith. MEMS MOEMS. 13(1), 011115 (Mar 20, 2014). doi:10.1117/1.JMM.13.1.011115
History: Received August 16, 2013; Revised January 13, 2014; Accepted February 4, 2014
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Abstract.  A translatory MOEMS actuator with extraordinary large stroke—especially developed for fast optical path length modulation in miniaturized Fourier transform infrared spectrometers (FTSs)—is presented. A precise translational out-of-plane oscillation at 500 Hz with large stroke of up to 1.2 mm is realized by means of an optimized MEMS design using four pantograph suspensions of the comparative large mirror plate with 5-mm diameter. The MOEMS device is driven electrostatically resonant and is manufactured in a CMOS compatible silicon-on-insulator process. Up to ±600μm amplitude (typically 1 mm stroke) has been measured in vacuum of 30 Pa and 50 V driving voltage for an optimized pantograph design enabling reduced gas damping and higher driving efficiency. For FTS system integration, the MOEMS actuator has been encapsulated in a hybrid optical vacuum package. The thermal influences of packaging technology on MOEMS behavior are discussed in more detail.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Thilo Sandner ; Thomas Grasshoff ; Eric Gaumont ; Harald Schenk and Andreas Kenda
"Translatory MOEMS actuator and system integration for miniaturized Fourier transform spectrometers", J. Micro/Nanolith. MEMS MOEMS. 13(1), 011115 (Mar 20, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.1.011115


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