Performance evaluation of perforated micro-cantilevers for MEMS applications

Kenkere B. M. Swamy; Banibrata Mukherjee; Zishan Ali Syed Mohammed; Suman Chakraborty; Siddhartha Sen

doi:10.1117/1.JMM.13.2.023001

9 April 2014 Performance evaluation of perforated micro-cantilevers for MEMS applications

Kenkere B. M. Swamy, Banibrata Mukherjee, Zishan Ali Syed Mohammed, Suman Chakraborty, Siddhartha Sen

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 2, 023001 (April 2014). https://doi.org/10.1117/1.JMM.13.2.023001

Abstract

Miniaturized cantilevers are one of the elementary structures that are widely used in many micro-devices and systems. The dynamic performance of micro-cantilevers having process dictated through perforations is investigated. High-aspect ratio, long silicon cantilevers, intended for improved performance through lowered stiffness are designed with a series of through holes and simulated along with similar nonperforated/solid cantilevers for comparison. A few perforated structures are also fabricated using silicon-on-insulator-based multiproject MEMS processes from MEMSCAP Inc. (Durham, North Carolina) by reduced mask level and eliminating complex substrate trenching step. The dynamic behavior of these fabricated structures is experimentally studied for both in-plane and out-of-plane directions. It is shown that, due to the presence of perforations, stiffness in planar direction is lightly affected, whereas in out-of-plane direction it is significantly reduced by <35% . Similarly, the variation of damping in both perforated and nonperforated beams, too, is thoroughly analyzed for the first few modes of vibration. Nevertheless, their frequency response variation of <10% for modal frequencies in both planar and out-of-plane directions as compared to the nonperforated counterparts, points to potential applications in several micro-systems including those based on comb drives.

Citation Download Citation

Kenkere B. M. Swamy, Banibrata Mukherjee, Zishan Ali Syed Mohammed, Suman Chakraborty, and Siddhartha Sen "Performance evaluation of perforated micro-cantilevers for MEMS applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(2), 023001 (9 April 2014). https://doi.org/10.1117/1.JMM.13.2.023001

Published: 9 April 2014

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