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Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology

[+] Author Affiliations
Pei Li

Tsinghua University, Department of Precision Instrument, Beijing 100084, China

Jing Pei

Tsinghua University, Department of Precision Instrument, Beijing 100084, China

Long-fa Pan

Tsinghua University, Department of Precision Instrument, Beijing 100084, China

Hans Zappe

University of Freiburg, Department of Microsystems Engineering-IMTEK, Freiburg 79110, Germany

J. Micro/Nanolith. MEMS MOEMS. 13(2), 023004 (Apr 28, 2014). doi:10.1117/1.JMM.13.2.023004
History: Received January 13, 2014; Revised March 26, 2014; Accepted April 7, 2014
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Abstract.  We describe a fabrication method for arrays of microlenses of low f-number by using a surface coating and dispensing technology. We demonstrate how to achieve a low f-number by selectively changing the surface wettability, as well as how to precisely control the f-number through control of the dispensing time. This advance enables the fabrication of arrays of microlenses with diameters varying from 400 to 1400 μm, f-number as low as 0.95. In addition, the optical performance tests indicate that this method is suitable for high performance microlens array fabrication. This dispensing technology may be low cost and allow fast fabrication of high-speed microlens arrays, and may thus be particularly useful for biologically inspired advanced optical systems.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Pei Li ; Jing Pei ; Long-fa Pan and Hans Zappe
"Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology", J. Micro/Nanolith. MEMS MOEMS. 13(2), 023004 (Apr 28, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.2.023004


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