Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology

Pei Li; Jing Pei; Long-fa Pan; Hans Zappe

doi:10.1117/1.JMM.13.2.023004

28 April 2014 Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology

Pei Li, Jing Pei, Long-fa Pan, Hans Zappe

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 13, Issue 2, 023004 (April 2014). https://doi.org/10.1117/1.JMM.13.2.023004

Abstract

We describe a fabrication method for arrays of microlenses of low f -number by using a surface coating and dispensing technology. We demonstrate how to achieve a low f-number by selectively changing the surface wettability, as well as how to precisely control the f -number through control of the dispensing time. This advance enables the fabrication of arrays of microlenses with diameters varying from 400 to 1400 μm, f -number as low as 0.95. In addition, the optical performance tests indicate that this method is suitable for high performance microlens array fabrication. This dispensing technology may be low cost and allow fast fabrication of high-speed microlens arrays, and may thus be particularly useful for biologically inspired advanced optical systems.

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Pei Li, Jing Pei, Long-fa Pan, and Hans Zappe "Fabrication method of low f-number microlens arrays by using surface coating and epoxy dispensing technology," Journal of Micro/Nanolithography, MEMS, and MOEMS 13(2), 023004 (28 April 2014). https://doi.org/10.1117/1.JMM.13.2.023004

Published: 28 April 2014

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