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Thermoplastic nanoimprint lithography of electroactive polymer poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) for micro/nanoscale sensors and actuators

[+] Author Affiliations
Leeya Engel

Tel Aviv University, Department of Physical Electronics Electrical Engineering and the Department of Material Science and Engineering, Faculty of Engineering, Tel Aviv 69978, Israel

Slava Krylov

Tel Aviv University, School of Mechanical Engineering, Engineering Faculty, Tel Aviv 69978, Israel

Yosi Shacham-Diamand

Tel Aviv University, Department of Physical Electronics Electrical Engineering and the Department of Material Science and Engineering, Faculty of Engineering, Tel Aviv 69978, Israel

J. Micro/Nanolith. MEMS MOEMS. 13(3), 033011 (Aug 27, 2014). doi:10.1117/1.JMM.13.3.033011
History: Received May 12, 2014; Revised July 28, 2014; Accepted August 5, 2014
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Abstract.  Thermoplastic nanoimprint lithography has been used for the first time, to the best of our knowledge, as a method for transferring nanoscale patterns to electroactive polymer poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) [P(VDF-TrFE-CFE)]. PVDF, its copolymers, and terpolymers cannot be processed using conventional lithography techniques because of their solubility in most organic solvents and photoresist developers. In this work, line-shaped patterns with widths of 60 to 100 nm were formed in the thermoplastic polymer by thermal compression using a previously patterned and treated silicon (Si) stamp. Annealing of the polymer under compression in a nanoimprinter following imprint resulted in a 10-fold improvement in the surface roughness of the polymer relative to spin-coated layers of P(VDF-TrFE-CFE). Patterning of distinct polymer structures on Si substrates (without residual layer) was achieved for micron scale structures. The processes presented here comprise a basis for the integration of P(VDF-TrFE-CFE) as an active material in nanoscale sensors and actuators.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Leeya Engel ; Slava Krylov and Yosi Shacham-Diamand
"Thermoplastic nanoimprint lithography of electroactive polymer poly(vinylidene fluoride-trifluoroethylene-chlorofluoroethylene) for micro/nanoscale sensors and actuators", J. Micro/Nanolith. MEMS MOEMS. 13(3), 033011 (Aug 27, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.3.033011


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