Special Section on Holistic/Hybrid Metrology

Combining metrology techniques for in-line control of thin SiGe:B layers

[+] Author Affiliations
Delphine Le Cunff

STMicroelectronics, Process Metrology Department, 850 rue Jean Monnet, 38926 Crolles Cedex, France

Thomas Nguyen, Romain Duru, Francesco Abbate

STMicroelectronics, Process Metrology Department, 850 rue Jean Monnet, 38926 Crolles Cedex, France

Jonny Hoglund, Nicolas Laurent

Semilab AMS, 47 Manning Road, Billerica, Massachusetts 01821, United States

Frederic Pernot, Matthew Wormington

Jordan Valley Semiconductors, Zone #6 Ramat Gavriel, Industrial Zone, Migdal Ha’Emek 23100, Israel

J. Micro/Nanolith. MEMS MOEMS. 13(4), 041402 (Sep 15, 2014). doi:10.1117/1.JMM.13.4.041402
History: Received June 11, 2014; Revised July 6, 2014; Accepted July 23, 2014
Text Size: A A A

Abstract.  A study performed to evaluate the benefits of combining techniques to improve the overall metrology of thin silicon germanium (SiGe) epitaxial layers doped with boron is presented. A specifically designed set of wafers was processed and measured by different in-line metrology tools and characterization techniques. This study describes the best strategy for combining metrology techniques in order to reliably determine dopant concentration and Ge composition measurement of the layers. It demonstrates that combined metrology enables key improvements in manufacturing and engineering environments.

Figures in this Article
© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Delphine Le Cunff ; Thomas Nguyen ; Romain Duru ; Francesco Abbate ; Jonny Hoglund, et al.
"Combining metrology techniques for in-line control of thin SiGe:B layers", J. Micro/Nanolith. MEMS MOEMS. 13(4), 041402 (Sep 15, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.4.041402


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.