JM3 Letters

SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications

[+] Author Affiliations
Angelo Gaitas

Kytaro, Inc., 11200 SW 8th Street, MARC 430, Miami, Florida 33199, United States

Florida International University, Electrical and Computer Engineering, 11200 SW 8th Street, MARC 430, Miami, Florida 33199, United States

Robert W. Hower

Kytaro, Inc., 11200 SW 8th Street, MARC 430, Miami, Florida 33199, United States

J. Micro/Nanolith. MEMS MOEMS. 13(3), 030501 (Sep 15, 2014). doi:10.1117/1.JMM.13.3.030501
History: Received April 15, 2014; Revised August 26, 2014; Accepted August 27, 2014
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Abstract.  We describe a method for fabricating an aperture on a fluidic cantilever device using SU-8 as a structural material. The device can ultimately be used for patch clamping, microinjections, fluidic delivery, fluidic deposition, and micromaterial removal. In the first generation of this device, the initial aperture diameter is 10  μm and is fabricated on a silicon-on-insulator (SOI) wafer that is structurally used to define the aperture. The aperture can be reduced in size through mask design. This self-aligned process allows for patterning on the sharp tip projecting out of the fluidic plane on the cantilever and is batch fabricated, reducing the cost and time for manufacture. The initial mask, SOI device layer thickness, and the width of the base of the tip define the size of the aperture. The SU-8 micromachined cantilever includes an electrode and a force sensing mechanism. The cantilever can be easily integrated with an atomic force microscope or an optical microscope.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Angelo Gaitas and Robert W. Hower
"SU-8 microcantilever with an aperture, fluidic channel, and sensing mechanisms for biological and other applications", J. Micro/Nanolith. MEMS MOEMS. 13(3), 030501 (Sep 15, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.3.030501


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