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Capillary-driven microfluidic chips with evaporation-induced flow control and dielectrophoretic microbead trapping

[+] Author Affiliations
Yuksel Temiz

IBM Research—Zurich, 8803 Rüschlikon, Switzerland

Jelena Skorucak

IBM Research—Zurich, 8803 Rüschlikon, Switzerland

Emmanuel Delamarche

IBM Research—Zurich, 8803 Rüschlikon, Switzerland

J. Micro/Nanolith. MEMS MOEMS. 13(3), 033018 (Sep 23, 2014). doi:10.1117/1.JMM.13.3.033018
History: Received December 20, 2013; Revised May 20, 2014; Accepted August 25, 2014
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Abstract.  This work reports our efforts on developing simple-to-use microfluidic devices for point-of-care diagnostic applications with recent extensions that include the trapping of microbeads using dielectrophoresis (DEP) and the modulation of the liquid flow using integrated microheaters. DEP serves the purpose of trapping microbeads coated with receptors and analytes for detection of a fluorescent signal. The microheater is actuated once the chip is filled by capillarity, creating an evaporation-induced flow tuned according to assay conditions. The chips are composed of a glass substrate patterned with 50-nm-thick Pd electrodes and microfluidic structures made using a 20-μm-thick dry-film resist (DFR). Chips are covered/sealed by low temperature (50°C) lamination of a 50-μm-thick DFR layer having excellent optical and mechanical properties. To separate cleaned and sealed chips from the wafer, we used an effective chip singulation technique which we informally call the “chip-olate” process. In the experimental section, we first studied dielectrophoretic trapping of 10-μm beads for flow rates ranging from 80pLs1 to 2.5nLs1 that are generated by an external syringe pump. Then, we characterized the embedded microheater in DFR-covered chips. Flow rates as high as 8nLs1 were generated by evaporation-induced flow when the heater was biased by 10 V, corresponding to 270-mW power. Finally, DEP-based trapping and fluorescent detection of functionalized beads were demonstrated as the flow was generated by evaporation-induced flow after the microfluidic structures were filled by capillarity.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Yuksel Temiz ; Jelena Skorucak and Emmanuel Delamarche
"Capillary-driven microfluidic chips with evaporation-induced flow control and dielectrophoretic microbead trapping", J. Micro/Nanolith. MEMS MOEMS. 13(3), 033018 (Sep 23, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.3.033018


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