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UV LED lithography with digitally tunable exposure dose

[+] Author Affiliations
Murat Kaya Yapici

Khalifa University, Department of Electrical and Computer Engineering, Abu Dhabi 127788, United Arab Emirates

Ilyas Farhat

Khalifa University, Department of Electrical and Computer Engineering, Abu Dhabi 127788, United Arab Emirates

J. Micro/Nanolith. MEMS MOEMS. 13(4), 043004 (Oct 21, 2014). doi:10.1117/1.JMM.13.4.043004
History: Received July 24, 2014; Revised September 23, 2014; Accepted September 24, 2014
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Abstract.  This paper reports the development of a low-cost, portable, light-emitting diode (LED)-based ultraviolet (UV) exposure system. The major system components include UV-LEDs, a microcontroller, a digital-to-analog converter, and LED control circuitry. Through its front panel with a liquid crystal display and keypad, the UV-LED lithography system is able to receive user-defined values for exposure time and power, which allows the exposure dose to be tunable on demand. Compared to standard mask aligners, the UV-LED lithography system is a fraction of the cost, is simpler to construct using off-the shelf components, and does not require a complex infrastructure to operate. Such a reduction in system cost and complexity renders UV-LED lithography a perfect candidate for microlithography with large process windows typically suitable for MEMS, microfluidics applications.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Murat Kaya Yapici and Ilyas Farhat
"UV LED lithography with digitally tunable exposure dose", J. Micro/Nanolith. MEMS MOEMS. 13(4), 043004 (Oct 21, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.4.043004


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