Special Section on Holistic/Hybrid Metrology

Hybrid metrology: from the lab into the fab

[+] Author Affiliations
Alok Vaid

GlobalFoundries, 400 Stonebreak Road Extension, Malta, New York 12020, United States

Alexander Elia, Givantha Iddawela

GlobalFoundries, 400 Stonebreak Road Extension, Malta, New York 12020, United States

Cornel Bozdog

Nova Measuring Instruments, Ltd., P.O. Box 266, Weizmann Science Park, Rehovot 76100, Israel

Matthew Sendelbach

Nova Measuring Instruments, Ltd., P.O. Box 266, Weizmann Science Park, Rehovot 76100, Israel

Byung Cheol (Charles) Kang

Nova Measuring Instruments, Ltd., P.O. Box 266, Weizmann Science Park, Rehovot 76100, Israel

Paul K. Isbester

Nova Measuring Instruments, Ltd., P.O. Box 266, Weizmann Science Park, Rehovot 76100, Israel

Shay Wolfling

Nova Measuring Instruments, Ltd., P.O. Box 266, Weizmann Science Park, Rehovot 76100, Israel

J. Micro/Nanolith. MEMS MOEMS. 13(4), 041410 (Nov 06, 2014). doi:10.1117/1.JMM.13.4.041410
History: Received May 14, 2014; Revised August 5, 2014; Accepted September 29, 2014
Text Size: A A A

Abstract.  The accelerated pace of the semiconductor industry in recent years is putting a strain on existing dimensional metrology equipment (such as critical dimension-secondary electron microscopy, atomic force microscopy, scatterometry) to keep up with ever-increasing metrology challenges. However, a revolution appears to be forming with the recent advent of hybrid metrology (HM). We highlight some of the challenges and lessons learned when setting up a standard HM solution and describe the first-in-industry implementation of HM within a high-volume manufacturing environment.

© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Alok Vaid ; Alexander Elia ; Givantha Iddawela ; Cornel Bozdog ; Matthew Sendelbach, et al.
"Hybrid metrology: from the lab into the fab", J. Micro/Nanolith. MEMS MOEMS. 13(4), 041410 (Nov 06, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.4.041410


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.