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Direct-write, microfiber-based template for pattern transfer of aligned metallic microwires

[+] Author Affiliations
Yiin-Kuen Fuh

National Central University, Department of Mechanical Engineering, No. 300, Jhongda Road, Jhongli City, Taoyuan County 32001, Taiwan

Hong-Yi Lu

National Central University, Department of Energy Engineering, No. 300, Jhongda Road, Jhongli City, Taoyuan County 32001, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 13(4), 043014 (Dec 11, 2014). doi:10.1117/1.JMM.13.4.043014
History: Received May 21, 2014; Accepted November 12, 2014
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Abstract.  We have demonstrated a fiber-based template process for fabricating site-specific and highly aligned platinum (Pt) microwires (MWs) with a polymeric core utilizing near-filed electrospinning (NFES) and soft transferring technology. Eliminating the indispensably expensive submicron lithographic and metal catalyst/lift-off as well as the extensive etching processes, the proposed method is direct-write, lithography-free, and low cost. As a demonstration, Pt sputtering deposition on top of a 500-μm length of microfibers for 5/10/15min is sufficient to produce highly conductible Pt MWs with a sheet resistance measured to be 1.46/1.09/0.83kΩ/sq, with good adhesion between the sputtered MWs and the underlying layers. The measured total resistances were found to increase almost linearly with the length of the MWs and are comparatively more conductive than polypyrrole films. Furthermore, the reliable and repeatable nanofiber arrays can be speedily fabricated, while various patterns and dimensions are predominantly controllable by NFES in a direct-write, addressable manner.

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© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Yiin-Kuen Fuh and Hong-Yi Lu
"Direct-write, microfiber-based template for pattern transfer of aligned metallic microwires", J. Micro/Nanolith. MEMS MOEMS. 13(4), 043014 (Dec 11, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.4.043014


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