Regular Articles

Analysis of line-edge roughness due to the stick/slip motion of a contact-mode scanning probe in plasmonic lithography

[+] Author Affiliations
Changhoon Park

Yonsei University, School of Mechanical Engineering, Nano Photonics Laboratory, 50 Yonsei-ro, Seodaemun-gu, Seoul 120-749, Republic of Korea

Jinhee Jang

Yonsei University, School of Mechanical Engineering, Nano Photonics Laboratory, 50 Yonsei-ro, Seodaemun-gu, Seoul 120-749, Republic of Korea

Jae Won Hahn

Yonsei University, School of Mechanical Engineering, Nano Photonics Laboratory, 50 Yonsei-ro, Seodaemun-gu, Seoul 120-749, Republic of Korea

J. Micro/Nanolith. MEMS MOEMS. 13(4), 043020 (Dec 18, 2014). doi:10.1117/1.JMM.13.4.043020
History: Received September 15, 2014; Accepted November 10, 2014
Text Size: A A A

Abstract.  In plasmonic lithography, when using a scanning probe in contact mode, degradation of the line pattern quality occasionally occurs due to variations of probe tip velocity or a stick/slip motion. To avoid poor pattern quality caused by such variations in probe tip motion, we analyzed the motion of the probe tip by using a frictional model based on conventional contact mechanics. The motion of the probe tip was numerically analyzed in terms of adhesion force and probe velocity, which are the dominant factors in micro/nanoscale motion. It was found that stick/slip spacing has a roughly positive relationship with the maximum adhesion force between the substrate and probe tip, and a negative relationship with the probe velocity. Combining the probe tip motion with the exposure model of a near-field wave, we analyzed the quality of line patterns that resulted from various stick/slip spacing in terms of line-edge roughness.

Figures in this Article
© 2014 Society of Photo-Optical Instrumentation Engineers

Citation

Changhoon Park ; Jinhee Jang and Jae Won Hahn
"Analysis of line-edge roughness due to the stick/slip motion of a contact-mode scanning probe in plasmonic lithography", J. Micro/Nanolith. MEMS MOEMS. 13(4), 043020 (Dec 18, 2014). ; http://dx.doi.org/10.1117/1.JMM.13.4.043020


Tables

Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Book Chapters

Topic Collections

PubMed Articles
Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.