Computational study of directed self-assembly for contact-hole shrink and multiplication

Tatsuhiro Iwama; Nabil Laachi; Kris T. Delaney; Glenn H. Fredrickson

doi:10.1117/1.JMM.14.1.013501

6 January 2015 Computational study of directed self-assembly for contact-hole shrink and multiplication

Tatsuhiro Iwama, Nabil Laachi, Kris T. Delaney, Glenn H. Fredrickson

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 1, 013501 (January 2015). https://doi.org/10.1117/1.JMM.14.1.013501

Abstract

We use three-dimensional self-consistent field theory (SCFT) to study the directed self-assembly (DSA) of cylinder-forming block copolymers in a peanut-shaped (also called egg-box) prepattern. The design of the prepattern shape will target the pitch reduction of the contact holes. The idea is that the DSA of block copolymers will not only lead to reduced critical dimensions relative to the template but will also repair defects in the guiding prepatterns and produce defect-free contact holes. We also study blends of block copolymers and homopolymers with various lengths and volume fractions. Using SCFT simulations, we establish the effects of the added homopolymer on defectivity, the process window, and the properties of the formed cylinders. In an attempt to quantify the effect of thermal fluctuations on the placement of the cylinders, we resort to complex Langevin simulations and perform a stochastic sampling of the assembled morphologies.

Citation Download Citation

Tatsuhiro Iwama, Nabil Laachi, Kris T. Delaney, and Glenn H. Fredrickson "Computational study of directed self-assembly for contact-hole shrink and multiplication," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(1), 013501 (6 January 2015). https://doi.org/10.1117/1.JMM.14.1.013501

Published: 6 January 2015

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