Micro-optoelectromechanical Systems (MOEMS)

Fabrication and characterization of an all optically addressed micromirror array

[+] Author Affiliations
Vaibhav Mathur

University of Massachusetts Lowell, Photonics Center, Lowell, Massachusetts 01854, United States

Shiva Vangala

Solid State Scientific Corporation, Nashua, New Hampshire 03060, United States

Air Force Research Laboratory, Sensors Directorate, WPAFB, Ohio 45433, United States

Jed Khoury

Air Force Research Laboratory, Sensors Directorate, WPAFB, Ohio 45433, United States

J. Micro/Nanolith. MEMS MOEMS. 14(1), 015501 (Jan 20, 2015). doi:10.1117/1.JMM.14.1.015501
History: Received August 19, 2014; Accepted December 18, 2014
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Abstract.  We describe the fabrication process for an optically addressed adaptive optics array. The device consists of a micromirror array cascaded directly on wafer fused gallium arsenide (GaAs)-gallium phosphide (GaP) photodiodes. Optically addressing a photodiode generates a photocurrent which in turn causes a voltage drop across the cascaded mirror via an integrated thin film resistor. This architecture allows parallel optical addressing of individual elements without the need for wire bonding each pixel, which can enable higher density segmented type arrays. We first describe a fabrication process for releasing a free-standing array of low stress SixN micromirrors on an indium phosphide (InP) support substrate. We then present a process for transferring GaAs p-i-n photodiodes on a transparent GaP support substrate using a specially designed wafer fusion fixture. The two samples when stacked together and electrically connected via a specially formulated and patterned semiconductive SU-8 resist form the final device. We report mirror displacements of up to 500 nm using this technique while requiring an optical signal as low as 150μW.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Vaibhav Mathur ; Shiva Vangala and Jed Khoury
"Fabrication and characterization of an all optically addressed micromirror array", J. Micro/Nanolith. MEMS MOEMS. 14(1), 015501 (Jan 20, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.1.015501


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