Microfabrication

Biopattern transfer using diatom frustules for fabrication of functional micro/nanostructures

[+] Author Affiliations
Yonggang Jiang, Jianchao Fu, Junfeng Pan, Jun Cai, Deyuan Zhang

Beihang University, School of Mechanical Engineering and Automation, Xueyuan Road No. 37, Haidian District, Beijing 100191, China

Zhonglie An

Tohoku University, Graduate School of Engineering, Aoba 6-6-01, Aramaki-Aza, Aoba-ku, Sendai 980-8579, Japan

J. Micro/Nanolith. MEMS MOEMS. 14(1), 014502 (Feb 18, 2015). doi:10.1117/1.JMM.14.1.014502
History: Received September 18, 2014; Accepted January 16, 2015
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Abstract.  Diatom frustules exhibit various sophisticated shapes with highly ordered hierarchical porous nanostructures, which are promising for applications in the biomimetic fabrication of nanostructured materials. We propose a universal biopattern transfer process for the fabrication of functional micro/nanostructures using diatom frustules as the biotemplates. Porous silicon microcylinders with a thickness of 20μm are fabricated by deep reactive ion etching of a silicon substrate, which is covered by a layer of diatom frustules. With a similar process, a fast atom beam technique is used to etch the silicon substrate and silicon nanolattices are obtained. By depositing a thin layer of gold film on the diatom bonded silicon substrate, followed by releasing the diatom frustules by diluted HF, gold nanodisks with a thickness of 30 nm are successfully fabricated. The nanodisk array arranges in diamond or radial patterns, replicating the nanostructure of diatom frustules. In addition, a parylene nanodot array is also demonstrated using this diatom-based biopattern transfer process.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Yonggang Jiang ; Jianchao Fu ; Junfeng Pan ; Zhonglie An ; Jun Cai, et al.
"Biopattern transfer using diatom frustules for fabrication of functional micro/nanostructures", J. Micro/Nanolith. MEMS MOEMS. 14(1), 014502 (Feb 18, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.1.014502


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