Biopattern transfer using diatom frustules for fabrication of functional micro/nanostructures

Yonggang Jiang; Jianchao Fu; Junfeng Pan; Zhonglie An; Jun Cai; Deyuan Zhang

doi:10.1117/1.JMM.14.1.014502

18 February 2015 Biopattern transfer using diatom frustules for fabrication of functional micro/nanostructures

Yonggang Jiang, Jianchao Fu, Junfeng Pan, Zhonglie An, Jun Cai, Deyuan Zhang

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 1, 014502 (February 2015). https://doi.org/10.1117/1.JMM.14.1.014502

Abstract

Diatom frustules exhibit various sophisticated shapes with highly ordered hierarchical porous nanostructures, which are promising for applications in the biomimetic fabrication of nanostructured materials. We propose a universal biopattern transfer process for the fabrication of functional micro/nanostructures using diatom frustules as the biotemplates. Porous silicon microcylinders with a thickness of 20 μm are fabricated by deep reactive ion etching of a silicon substrate, which is covered by a layer of diatom frustules. With a similar process, a fast atom beam technique is used to etch the silicon substrate and silicon nanolattices are obtained. By depositing a thin layer of gold film on the diatom bonded silicon substrate, followed by releasing the diatom frustules by diluted HF, gold nanodisks with a thickness of 30 nm are successfully fabricated. The nanodisk array arranges in diamond or radial patterns, replicating the nanostructure of diatom frustules. In addition, a parylene nanodot array is also demonstrated using this diatom-based biopattern transfer process.

Citation Download Citation

Yonggang Jiang, Jianchao Fu, Junfeng Pan, Zhonglie An, Jun Cai, and Deyuan Zhang "Biopattern transfer using diatom frustules for fabrication of functional micro/nanostructures," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(1), 014502 (18 February 2015). https://doi.org/10.1117/1.JMM.14.1.014502

Published: 18 February 2015

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available