Lithography

Fabrication of self-aligned, nanoscale, complex oxide varactors

[+] Author Affiliations
Richard X. Fu, Samuel G. Hirsch, Mathew P. Ivill, Melanie W. Cole, Kenneth E. Strawhecker

U.S. Army Research Laboratory, 2800 Powder Mill Road, Adelphi, Maryland 20783, United States

Ryan C. Toonen

University of Akron, Department of Electrical and Computer Engineering, ASEC 555, Akron, Ohio 44325-3904, United States

J. Micro/Nanolith. MEMS MOEMS. 14(1), 013508 (Mar 03, 2015). doi:10.1117/1.JMM.14.1.013508
History: Received September 23, 2014; Accepted January 30, 2015
Text Size: A A A

Abstract.  Applications in ferroelectric random access memory and superparaelectric devices require the fabrication of ferroelectric capacitors at the nanoscale that exhibit extremely small leakage currents. To systematically study the material-size dependence of ferroelectric varactor performance, arrays of parallel-plate structures have been fabricated with nanoscale dielectric diameters. Electron beam lithography and inductively coupled plasma dry etching have been used to fabricate arrays of ferroelectric varactors using top electrodes as a self-aligned etch mask. Parallel-plate test structures using RF-sputtered Ba0.6Sr0.4TiO3 thin-films were used to optimize the fabrication process. Varactors with diameters down to 20 nm were successfully fabricated. Current-voltage (I-V) characteristics were measured to evaluate the significance of etch-damage and fabrication quality by ensuring low leakage currents through the structures.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Richard X. Fu ; Ryan C. Toonen ; Samuel G. Hirsch ; Mathew P. Ivill ; Melanie W. Cole, et al.
"Fabrication of self-aligned, nanoscale, complex oxide varactors", J. Micro/Nanolith. MEMS MOEMS. 14(1), 013508 (Mar 03, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.1.013508


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.