Micro-optoelectromechanical Systems (MOEMS)

Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter

[+] Author Affiliations
Kareem Khirallah

Boston University, Department of Mechanical Engineering, Boston, Massachusetts 02215, United States

Mohamed A. Swillam

The American University in Cairo, School of Science and Engineering, Department of Physics, New Cairo 11835, Egypt

J. Micro/Nanolith. MEMS MOEMS. 14(2), 025501 (Apr 06, 2015). doi:10.1117/1.JMM.14.2.025501
History: Received November 10, 2014; Accepted March 13, 2015
Text Size: A A A

Abstract.  Nanoelectromechanical systems (NEMS) design for active resonance frequency tuning of plasmonics optical filter is proposed and discussed. The design is based on controlling the relative position between two stubs in a metal–insulator–metal plasmonics waveguide using NEMS technology. The analysis of the optical design as well as the mechanical design is performed. Finally, a reasonable fabrication process of the device is proposed. For the suggested mechanical design parameters, the optical resonance wavelength can be tuned from 1.45 to 1.65μm using 7VDC actuation voltage.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Kareem Khirallah and Mohamed A. Swillam
"Nanoelectromechanical systems-based metal-insulator-metal plasmonics tunable filter", J. Micro/Nanolith. MEMS MOEMS. 14(2), 025501 (Apr 06, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.2.025501


Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).

Some tools below are only available to our subscribers or users with an online account.

Related Content

Customize your page view by dragging & repositioning the boxes below.

Related Journal Articles

Related Book Chapters

Topic Collections

Advertisement
  • Don't have an account?
  • Subscribe to the SPIE Digital Library
  • Create a FREE account to sign up for Digital Library content alerts and gain access to institutional subscriptions remotely.
Access This Article
Sign in or Create a personal account to Buy this article ($20 for members, $25 for non-members).
Access This Proceeding
Sign in or Create a personal account to Buy this article ($15 for members, $18 for non-members).
Access This Chapter

Access to SPIE eBooks is limited to subscribing institutions and is not available as part of a personal subscription. Print or electronic versions of individual SPIE books may be purchased via SPIE.org.