Microelectromechanical Systems (MEMS)

Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths

[+] Author Affiliations
Kyo Sang Choi, Deok Su Kim, Hee June Yang, Min Soo Ryu, Ji Sung Chae, Sung Pil Chang

Inha University, Department of Electronic Engineering, 253 Younghyun-dong, Incheon 402-751, South Korea

J. Micro/Nanolith. MEMS MOEMS. 14(2), 025001 (Apr 09, 2015). doi:10.1117/1.JMM.14.2.025001
History: Received February 3, 2015; Accepted March 23, 2015
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Abstract.  This paper describes the design, fabrication, and characterization of a capacitive humidity sensor with water vapor inlet holes of different depths. The humidity sensors were composed of a SiO2 insulation layer, a bottom electrode, a polyimide (PI) sensing layer, and a top electrode containing water vapor inlet holes. The sensors were 3.5mm×3.5mm with a 0.7-μm thick PI-based sensing layer. A humidity sensor with a partially etched PI layer in the water vapor inlet holes had the following characteristics: sensitivity 1500fF/%RH, hysteresis 0.37%, and a response time of 70 s.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Topics

Humidity ; Sensors ; Water

Citation

Kyo Sang Choi ; Deok Su Kim ; Hee June Yang ; Min Soo Ryu ; Ji Sung Chae, et al.
"Comparison and analysis of capacitive humidity sensors with water vapor inlet holes of different depths", J. Micro/Nanolith. MEMS MOEMS. 14(2), 025001 (Apr 09, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.2.025001


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