Microelectromechanical Systems (MEMS)

Fabrication and reliability study of a double spiral platinum-based MEMS hotplate

[+] Author Affiliations
Mahanth Prasad, Vinod Kumar Khanna

MEMS and Microsensors Group, Council of Scientific and Industrial Research-Central Electronics Engineering Research Institute, Pilani 333031, Rajasthan, India

Dhairya Singh Arya

Kurukshetra University, Department of Electronics and Communication Engineering, Kurukshetra 136119, India

J. Micro/Nanolith. MEMS MOEMS. 14(2), 025003 (Jun 05, 2015). doi:10.1117/1.JMM.14.2.025003
History: Received March 20, 2015; Accepted May 4, 2015
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Abstract.  A MEMS hotplate consisting of a double spiral platinum-based element was designed and simulated using MEMS-CAD tool COVENTORWARE. A platinum resistor of 115Ω was fabricated on a 0.6μm-thickSiO2 membrane of size 120μm×120μm. The hotplate consumes 54 mW when heated up to 756°C. The temperature coefficient of resistance of platinum was measured and found to be 2.19×103/°C. The fabrication and reliability testing of the hotplate are described. The test results show that the hotplate can continuously operate at 580°C for 5.5 h and it can sustain at least 60 cycles of pulse-mode operation at 530°C with very low temperature and resistance drifts. The maximum current capability of the hotplate was found to be 13.4 mA without any damage to the structure.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Mahanth Prasad ; Dhairya Singh Arya and Vinod Kumar Khanna
"Fabrication and reliability study of a double spiral platinum-based MEMS hotplate", J. Micro/Nanolith. MEMS MOEMS. 14(2), 025003 (Jun 05, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.2.025003


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