A MEMS hotplate consisting of a double spiral platinum-based element was designed and simulated using MEMS-CAD tool COVENTORWARE. A platinum resistor of was fabricated on a membrane of size . The hotplate consumes 54 mW when heated up to 756°C. The temperature coefficient of resistance of platinum was measured and found to be . The fabrication and reliability testing of the hotplate are described. The test results show that the hotplate can continuously operate at 580°C for 5.5 h and it can sustain at least 60 cycles of pulse-mode operation at 530°C with very low temperature and resistance drifts. The maximum current capability of the hotplate was found to be 13.4 mA without any damage to the structure.