Special Section on Alternative Lithographic Technologies IV

Alternative stitching method for massively parallel e-beam lithography

[+] Author Affiliations
Pieter Brandt, Marco Wieland

MAPPER Lithography, Computerlaan 15, 2628 XK Delft, The Netherlands

Céline Tranquillin, Sébastien Bayle, Matthieu Milléquant, Guillaume Renault

ASELTA Nanographics, 7 Parvis Louis Néel, 38040 Grenoble Cedex 9, France

J. Micro/Nanolith. MEMS MOEMS. 14(3), 031203 (Jul 02, 2015). doi:10.1117/1.JMM.14.3.031203
History: Received April 16, 2015; Accepted June 2, 2015
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Abstract.  In this study, a stitching method other than soft edge (SE) and smart boundary (SB) is introduced and benchmarked against SE. The method is based on locally enhanced exposure latitude without throughput cost, making use of the fact that the two beams that pass through the stitching region can deposit up to 2× the nominal dose. The method requires a complex proximity effect correction that takes a preset stitching dose profile into account. Although the principle of the presented stitching method can be multibeam (lithography) systems in general, in this study, the MAPPER FLX 1200 tool is specifically considered. For the latter tool at a metal clip at minimum half-pitch of 32 nm, the stitching method effectively mitigates beam-to-beam (B2B) position errors such that they do not induce an increase in critical dimension uniformity (CDU). In other words, the same CDU can be realized inside the stitching region as outside the stitching region. For the SE method, the CDU inside is 0.3 nm higher than outside the stitching region. A 5-nm direct overlay impact from the B2B position errors cannot be reduced by a stitching strategy.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Pieter Brandt ; Céline Tranquillin ; Marco Wieland ; Sébastien Bayle ; Matthieu Milléquant, et al.
"Alternative stitching method for massively parallel e-beam lithography", J. Micro/Nanolith. MEMS MOEMS. 14(3), 031203 (Jul 02, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.3.031203


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