Special Section on Alternative Lithographic Technologies IV

Control of polystyrene-block-poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing

[+] Author Affiliations
Alan G. Jacobs, Byungki Jung, Jing Jiang, Christopher K. Ober, Michael O. Thompson

Cornell University, Materials Science and Engineering, 214 Bard Hall, Ithaca, New York 14853-1501, United States

J. Micro/Nanolith. MEMS MOEMS. 14(3), 031205 (Jul 07, 2015). doi:10.1117/1.JMM.14.3.031205
History: Received April 12, 2015; Accepted June 8, 2015
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Abstract.  Directed self-assembly of polystyrene-block-poly(methyl methacrylate) (PS-b-PMMA) during laser thermal annealing at peak temperatures of 300°C–800°C for dwells of 1–10 ms has been explored. The enhanced mobility of polymer chains at these temperatures improves registration compared with conventional thermal anneals. PS-b-PMMA films (forming 15-nmline/space standing lamellae) were cast on chemically patterned substrates with a copolymer neutral layer and annealed by laser and hot plate. Annealing by hot plate or multiple laser scans resulted in well-aligned features over micron length scales. By laser annealing multiple times, defectivity was reduced by 60%. However, laser annealing for only 10 ms before performing a hot plate anneal reduced defectivity by >80%. We believe that this reduction arises from improved interfacial alignment of the film to the template during laser annealing near the order–disorder transition.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Alan G. Jacobs ; Byungki Jung ; Jing Jiang ; Christopher K. Ober and Michael O. Thompson
"Control of polystyrene-block-poly(methyl methacrylate) directed self-assembly by laser-induced millisecond thermal annealing", J. Micro/Nanolith. MEMS MOEMS. 14(3), 031205 (Jul 07, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.3.031205


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