Special Section on the Interface of Holography and MEMS

Development of lossy and near-lossless compression methods for wafer surface structure digital holograms

[+] Author Affiliations
Hongbo Zhang, Donald Leber, Ting-Chung Poon

Virginia Tech, Bradley Department of Electrical and Computer Engineering, Perry Street, Blacksburg, Virginia 24060, United States

Wenjing Zhou

Virginia Tech, Bradley Department of Electrical and Computer Engineering, Perry Street, Blacksburg, Virginia 24060, United States

Shanghai University, Department of Precision Mechanical Engineering, 149 Yanchang Road, Shanghai 200072, China

Zhijuan Hu

Shanghai Normal University, Mathematics and Science College, 100 Guilin Road, Shanghai 200234, China

Xin Yang

Soochow University, Institute of Information Optics Engineering, 1 Shixin Street, Suzhou, Jiangsu 210056, China

Peter W. M. Tsang

City University of Hong Kong, Department of Electronic Engineering, 83 Tat Chee Avenue, Kowloon, Hong Kong, China

J. Micro/Nanolith. MEMS MOEMS. 14(4), 041304 (Aug 03, 2015). doi:10.1117/1.JMM.14.4.041304
History: Received April 22, 2015; Accepted June 25, 2015
Text Size: A A A

Abstract.  Lossy and near-lossless digital hologram compression methods are investigated to compress different complexities of wafer surface structures. In the lossy compression method, we apply row- and column-based uniform downsampling together with spline interpolation, whereas in the near-lossless compression method, we use wavelet local modulus maxima and spline interpolation. Results have shown that the lossy compression method is able to achieve a compression ratio of up to 100 for simpler wafer surface structures than that for complex surface structures. However, the near-lossless compression method is able to yield almost lossless compression even for complex wafer surface structures with a compression of about two. The proposed compression methods are computationally friendly for wafer surface structures as there is no time-consuming iterative computation involved.

Figures in this Article
© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Hongbo Zhang ; Wenjing Zhou ; Donald Leber ; Zhijuan Hu ; Xin Yang, et al.
"Development of lossy and near-lossless compression methods for wafer surface structure digital holograms", J. Micro/Nanolith. MEMS MOEMS. 14(4), 041304 (Aug 03, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.4.041304


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