Special Section on the Interface of Holography and MEMS

Photorefractive holographic camera for monitoring deformations of MEMS

[+] Author Affiliations
Marc P. Georges, Cédric Thizy

Université de Liège, Centre Spatial de Liège, Liege Science Park, Avenue du Pré Aily, 4031 Angleur, Belgium

J. Micro/Nanolith. MEMS MOEMS. 14(4), 041306 (Aug 11, 2015). doi:10.1117/1.JMM.14.4.041306
History: Received April 15, 2015; Accepted July 7, 2015
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Abstract.  We present the development of a holographic interferometer based on a dynamic hologram recording with photorefractive crystals of the sillenite family and which is adapted for the observation of MEMS. A compact portable system was already presented in the past and used in various metrology and nondestructive applications on large scattering objects. The great versatility of the instrument, which allows high-resolution measurements, was emphasized. We show the development and achievement of an optical module which can be easily interfaced on the basic instrument, allowing small specular objects’ observation. The results of deformation of electrically actuated MEMS are shown.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Marc P. Georges and Cédric Thizy
"Photorefractive holographic camera for monitoring deformations of MEMS", J. Micro/Nanolith. MEMS MOEMS. 14(4), 041306 (Aug 11, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.4.041306


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