Special Section on the Interface of Holography and MEMS

Optical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements

[+] Author Affiliations
Quang Duc Pham, Yoshio Hayasaki

Utsunomiya University, Center for Optical Research and Education, 7-1-2, Yoto, Utsunomiya 321-8585, Japan

J. Micro/Nanolith. MEMS MOEMS. 14(4), 041305 (Aug 10, 2015). doi:10.1117/1.JMM.14.4.041305
History: Received March 27, 2015; Accepted July 7, 2015
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Abstract.  We demonstrated optical-frequency-comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a photodetector for measurement of large-depth objects. Use of two harmonic frequencies allowed us to measure an object with a meter-order depth without any 2π-phase ambiguity. Profilometry with 10×10 pixels using the 12th and 13th harmonics of the fundamental frequency of 76 MHz gave a noise level of 10μm in terms of standard deviation. Linking the measurement results obtained using one and two frequencies gave an axial dynamic range of 3.9×105.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Quang Duc Pham and Yoshio Hayasaki
"Optical frequency comb profilometry with a compressive sensing–based single-pixel camera composed of digital micromirror devices and a two-frequency method for meter-order depth measurements", J. Micro/Nanolith. MEMS MOEMS. 14(4), 041305 (Aug 10, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.4.041305


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