Special Section on Alternative Lithographic Technologies IV

Efficient layout data compression algorithm and its low-complexity, high-performance hardware decoder implementation for multiple electron-beam direct-write systems

[+] Author Affiliations
Chin-Khai Tang, Yi-Chang Lu

National Taiwan University, Graduate Institute of Electronics Engineering, No. 1 Section 4 Roosevelt Road, Taipei 10617, Taiwan

Ming-Shing Su

QNAP Systems, Inc., 3F., No. 22, Zhongxing Road, New Taipei City 221, Taiwan

J. Micro/Nanolith. MEMS MOEMS. 14(3), 031212 (Aug 11, 2015). doi:10.1117/1.JMM.14.3.031212
History: Received April 15, 2015; Accepted July 10, 2015
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Abstract.  A lossless electron-beam layout (EBL) data compression algorithm, LineDiff Entropy v2.0, and its low-complexity, high-performance hardware decoder for multiple electron-beam direct-write lithography systems are proposed. The algorithm compares consecutive data scanlines and encodes the data based on the change/no-change of pixel values and the lengths of pixel sequences. Then, the compaction steps of data omission, merging, and encoding of consecutive long identical scanlines are applied. Unique short codes are assigned to data with high occurrence frequency. The hardware decoder is designed as three circuit blocks that perform entropy decoding, decompaction, and EBL data generation through parallel outputs. The results demonstrate that our algorithm can achieve excellent compression performance and that the hardware decoder can decompress data at very high data rates.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Chin-Khai Tang ; Ming-Shing Su and Yi-Chang Lu
"Efficient layout data compression algorithm and its low-complexity, high-performance hardware decoder implementation for multiple electron-beam direct-write systems", J. Micro/Nanolith. MEMS MOEMS. 14(3), 031212 (Aug 11, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.3.031212


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