Microelectromechanical Systems (MEMS)

Low-cost reciprocating electromagnetic-based micropump for high-flow rate applications

[+] Author Affiliations
Abbas Hakim Sima

Sharif Energy Research Institute, Teymouri Boulevard, Tarasht, Tehran 1459777611, Iran

Alinaghi Salari, Mohammad Behshad Shafii

Sharif University of Technology, Mechanical Engineering Department, Azadi Street, Tehran 1136511155, Iran

J. Micro/Nanolith. MEMS MOEMS. 14(3), 035003 (Sep 03, 2015). doi:10.1117/1.JMM.14.3.035003
History: Received April 25, 2015; Accepted July 23, 2015
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Abstract.  A reciprocating single-chamber micropump is designed and experimentally tested. The actuation technique of the pump is based on Lorentz force acting on an array of low-weight microwires placed on a flexible membrane surface. A square-wave electric current (5.6 and 7.8 A) with a low-frequency range (5.6 to 7.6 Hz) is applied through the microwires in the presence of a perpendicular magnetic field (0.08 to 0.09 T). The resultant oscillating Lorentz force causes the membrane to oscillate with the same frequency, and pushes the fluid to flow toward the outlet using a high-efficiency ball-valve. The micropump has exhibited a maximum efficiency of 2.03% with a flow rate as high as 490μl/s and back pressure up to 1.5 kPa. Having a high self-pumping frequency of Fsp=32.71/min compared to other micropumps, our proposed pump is suitable for a wide range of applications specifically for biofluid transport.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Topics

Magnetism

Citation

Abbas Hakim Sima ; Alinaghi Salari and Mohammad Behshad Shafii
"Low-cost reciprocating electromagnetic-based micropump for high-flow rate applications", J. Micro/Nanolith. MEMS MOEMS. 14(3), 035003 (Sep 03, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.3.035003


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