Design and fabrication of a reduced stiction radio frequency MEMS switch

Deepak Bansal; Anuroop Bajpai; Prem Kumar; Amit Kumar; Maninder Kaur; Kamaljit Rangra

doi:10.1117/1.JMM.14.3.035002

3 September 2015 Design and fabrication of a reduced stiction radio frequency MEMS switch

Deepak Bansal, Anuroop Bajpai, Prem Kumar, Amit Kumar, Maninder Kaur, Kamaljit Rangra

Author Affiliations +
Deepak Bansal,^1,2,3 Anuroop Bajpai,^1,2 Prem Kumar,^1,2 Amit Kumar,^1,2,3 Maninder Kaur,^1,2 Kamaljit Rangra^1,2,3

¹CSIR-Central Electronics Engineering Research Institute (India)
²Sensors and Nanotechnology Group (India)
³Academy of Scientific and Innovative Research (AcSIR) (India)

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 3, 035002 (September 2015). https://doi.org/10.1117/1.JMM.14.3.035002

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Abstract

The design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch are presented. The switch has a resonance frequency of 9.8 kHz with a corresponding switching speed of 46 μs. Use of a floating metal layer and optimal contact area ensures reduced stiction and smaller capacitive leakage. Overall size of the switch is 0.535 (0.50×1.070) mm². Reduction in up-state capacitance also results in improvement in self-actuation voltage, insertion, and return loss. The optimized topology has improved the stiction and power handling of the switch.

© 2015 Society of Photo-Optical Instrumentation Engineers (SPIE) 1932-5150/2015/$25.00 © 2015 SPIE

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Deepak Bansal, Anuroop Bajpai, Prem Kumar, Amit Kumar, Maninder Kaur, and Kamaljit Rangra "Design and fabrication of a reduced stiction radio frequency MEMS switch," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(3), 035002 (3 September 2015). https://doi.org/10.1117/1.JMM.14.3.035002

Published: 3 September 2015

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KEYWORDS

Switches

Microelectromechanical systems

Metals

Electrodes

Dielectrics

Capacitance

Oxides

Switching

Scanning electron microscopy

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Deepak Bansal, Anuroop Bajpai, Prem Kumar, Amit Kumar, Maninder Kaur, Kamaljit Rangra, "Design and fabrication of a reduced stiction radio frequency MEMS switch," J. Micro/Nanolith. MEMS MOEMS 14(3) 035002 (3 September 2015) https://doi.org/10.1117/1.JMM.14.3.035002

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