Microelectromechanical Systems (MEMS)

Design and fabrication of a reduced stiction radio frequency MEMS switch

[+] Author Affiliations
Deepak Bansal, Amit Kumar, Kamaljit Rangra

Sensors and Nanotechnology Group, CSIR–Central Electronics Engineering Research Institute (CEERI), Pilani, Rajasthan 333031, India

Academy of Scientific and Innovative Research (AcSIR), Taramani, Chennai 600 113, India

Anuroop Bajpai, Prem Kumar, Maninder Kaur

Sensors and Nanotechnology Group, CSIR–Central Electronics Engineering Research Institute (CEERI), Pilani, Rajasthan 333031, India

J. Micro/Nanolith. MEMS MOEMS. 14(3), 035002 (Sep 03, 2015). doi:10.1117/1.JMM.14.3.035002
History: Received March 11, 2015; Accepted August 4, 2015
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Abstract.  The design, fabrication, and mechanical characterization of a compact-reduced stiction see-saw radio frequency MEMS switch are presented. The switch has a resonance frequency of 9.8 kHz with a corresponding switching speed of 46μs. Use of a floating metal layer and optimal contact area ensures reduced stiction and smaller capacitive leakage. Overall size of the switch is 0.535 (0.50×1.070)mm2. Reduction in up-state capacitance also results in improvement in self-actuation voltage, insertion, and return loss. The optimized topology has improved the stiction and power handling of the switch.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Deepak Bansal ; Anuroop Bajpai ; Prem Kumar ; Amit Kumar ; Maninder Kaur, et al.
"Design and fabrication of a reduced stiction radio frequency MEMS switch", J. Micro/Nanolith. MEMS MOEMS. 14(3), 035002 (Sep 03, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.3.035002


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