Microelectromechanical Systems (MEMS)

Microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy

[+] Author Affiliations
Song Xu, Chih-Hsien Huang, Jun Zou

Texas A&M University, Institute for Solid State Electronics, Electrical Engineering Department, Room 220A, Wisenbaker Engineering Building, College Station, Texas 77843-3128, United States

J. Micro/Nanolith. MEMS MOEMS. 14(3), 035004 (Sep 04, 2015). doi:10.1117/1.JMM.14.3.035004
History: Received May 16, 2015; Accepted July 30, 2015
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Abstract.  Microscanning mirrors that can operate reliably under water are useful in both ultrasound and photoacoustic microscopic imaging, where fast scanning of focused high-frequency ultrasound beams is desired for pixel-by-pixel data acquisition. We report the development of a new microfabricated water-immersible scanning mirror with a small form factor. It consists of an optically and acoustically reflective mirror plate which is supported by two flexible polymer hinges and driven by an integrated electromagnetic microactuator. It can achieve 1-axis scanning of ±12.1deg at a resonant frequency of 250 Hz in air and 210 Hz in water, respectively. By optimizing the design and enhancing the fabrication with high-precision optical three-dimensional printing, the overall size of the scanning mirror module is less than 7mm×5mm×7mm. The small form factor, large scanning angle, and high-resonant frequency of the new water-immersible scanning mirror make it suitable for building compact handheld imaging probes for in vivo high-speed and wide-field ultrasound and photoacoustic microscopy.

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© 2015 Society of Photo-Optical Instrumentation Engineers

Citation

Song Xu ; Chih-Hsien Huang and Jun Zou
"Microfabricated water-immersible scanning mirror with a small form factor for handheld ultrasound and photoacoustic microscopy", J. Micro/Nanolith. MEMS MOEMS. 14(3), 035004 (Sep 04, 2015). ; http://dx.doi.org/10.1117/1.JMM.14.3.035004


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